Oxford Instruments and York strengthen plasma research partnership
Posted on Monday 7 September 2026
The collaboration builds on more than a decade of joint research in plasma chemistry, diagnostics and modelling to advance future semiconductor manufacturing technologies. The MoU provides a framework for closer engagement, de-siloing academic and commercial interests through shared approaches that support the delivery of world-leading products and scientific findings.
We have established a unique position as a centre of excellence in low-temperature plasma chemistry and diagnostics within the UK. Over the past ten years, the partnership has enabled Oxford Instruments and our researchers to work together on a range of research initiatives aimed at improving understanding of plasma processes that are critical to advanced semiconductor manufacturing and materials processing.
As semiconductor devices become increasingly complex, the demand for deeper insight into plasma behaviour, process control and material interactions continues to grow. Through this renewed collaboration, we will explore new opportunities to accelerate process innovation by combining Oxford Instruments' expertise in plasma process equipment with our leading capabilities in plasma modelling, chemistry and diagnostics.
"The University of York has been an invaluable research partner for more than a decade, helping us deepen our understanding of plasma science and develop knowledge that supports innovation across our product portfolio," said Matt Kelly, Managing Director, Oxford Instruments Plasma Technology. "This Memorandum of Understanding reflects our shared commitment to strengthening that relationship and continuing to invest in collaborative research that advances semiconductor manufacturing technologies and supports the wider UK innovation ecosystem.
"Our long-standing collaboration with Oxford Instruments demonstrates the value of close partnerships between academia and industry," said Erik Wagenaars, Director of York Plasma Institute, University of York, "By combining fundamental plasma science with industrial applications, we can accelerate research that addresses real-world technology challenges while helping to train the next generation of scientists and engineers."