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Parallel Auger Electron Analyser
Auger electron spectroscopy (AES) is a method used for the elemental identification of the top few atomic layers of a solid. This method has been crucial in the development of many state-of-the-art electronic devices and has been successfully applied to a diverse range of applications from gas phase chemistry to nanostructure characterisation.
However, current AES hardware suffers from being bulky, expensive and very slow, requiring an ultra-high vacuum environment for successful analysis. These deficiencies have limited its widespread uptake in electron microscopy and yet, there is substantial evidence of market demand for a system that can address these issues. In order to address these shortcomings, considerable effort has been focussed in developing a fast Auger electron detector to suit the electron microscope environment. The analyser development at York builds on a recent design breakthrough and positively addresses all of the above shortcomings by providing system that can capture an entire Auger spectrum in less than a second.
Benefits
- Capture en entire Auger spectrum in less than a second
- High energy resolution
- Good sensitivity
- Potential to be retro fitted to existing electron microscopes
- No need for UHV
Applications
- Quantitative elemental analysis of nanometric devices and structures.
- Semiconductor industry – assessment of ‘killer particles’
Investment readiness status
Conversations with microscope developers or any collaborator interested in technical development of this analyser are welcomed.
IP status
Patent filed